VEAT-001 high vacuum pumping station is a fully automatic vacuum processing equipment designed for semiconductor manufacturing, aerospace component packaging, optoelectronic material processing and other fields. It supports 6-20 stations of synchronous vacuuming, and the ultimate vacuum degree reaches 6.7×10⁻⁴Pa. It adopts an oil-free molecular pump + mechanical pump three-stage system, which complies with IEC 60255 and ISO 9001 standards.
VEAT-003 Roots vacuum pump is specially designed for vacuum engineering testing. It integrates high-efficiency energy saving and intelligent control technology, provides a pumping speed of 1200 m³/h and a limit vacuum of 0.05 Pa. It is suitable for high-precision industries such as semiconductors, medical treatment, and environmental protection. It reduces energy consumption by more than 50%, and extends the maintenance cycle to 4 years, helping industrial processes to operate efficiently and stably.
