VEAT-005 is a Roots + dry screw pump integrated vacuum system, which adopts the combination of "ZJY Roots pump (main pump) + dry screw pump (foreline pump)", achieving a high pumping speed of 150m³/h (10Pa working condition), dry oil-free cleaning (Class 5 clean room compatible), and closed-loop exhaust gas recovery. It is suitable for processes with strict environmental protection and cleaning requirements such as medicine (vacuum freeze-drying), chemical industry (solvent recovery), and electronics (semiconductor processing), and complies with ISO 21360 (Roots pump) and GB/T 3216 (screw pump) standards.
Item No. :
VEAT-005Minimum Order Quantity (MOQ) :
1 SetPayment Method :
L/C, T/TPrice :
NegotiatableProduct Origin :
chinaSupply Ability :
10 Set per monthLead Time :
90 DaysConventional packaging :
PlywoodRoots Screw Vacuum Unit 50m³/H High Pumping Speed Dry Oil-Free Cleaning
Product introduction:
Processes such as pharmaceutical freeze-drying and electronic coating require both high pumping speed (shortening production cycle) and oil-free pollution (ensuring product purity), which are difficult to be taken into account by traditional units. VEAT-005 has achieved three innovative breakthroughs:
Dual pump synergy: Roots pump focuses on high vacuum section (10⁻²~10Pa), dry screw pump ensures low vacuum start (10²~10⁵Pa), and the pumping speed reaches 150m³/h under 10Pa working conditions (40% increase compared to single screw pump);
Dry oil-free: The front stage pump adopts dry screw design and oil-free lubrication to avoid oil mist contamination of the pumped materials (such as pharmaceutical intermediates and chips), meeting Class 5 clean room requirements;
Pollution closed loop: standard air intake filter (≥5μm particle interception rate 99%) + buffer gas storage tank to reduce foreign body wear; integrated waste gas recovery module, solvent recovery rate ≥95%, in line with pharmaceutical/chemical environmental protection regulations.
The system is pre-assembled with a switch box and intelligent PLC, and the system is fully debugged at the factory. It can be put into operation after “connecting to the power supply and the process port” on site, shortening the debugging cycle by 60%.
International reference standards:
ISO 21360:2018: Pumping speed deviation ≤±5%, noise ≤85dB (A)
GB/T 3216-2016: Ultimate vacuum ≤10⁻¹Pa, volumetric efficiency ≥90%
ISO 14644-1:2015: Exhaust dust content ≤10⁵particles/m³ (Class 5)
GB 150-2011: Withstand pressure ≥1.6MPa, leakage rate ≤10⁻⁴mbar・L/s
| Parameter | Specification |
| Model No. | VEAT-005 |
| Pump Configuration | ZJY Roots Pump (Main) + Dry Screw Pump (Forepump) |
| Ultimate Vacuum | ≤10⁻² Pa (Steady State, Roots Pump Section) |
| Pumping Speed (10Pa) | ≤150 m³/h |
| Forepump Type | Dry Screw Pump (Oil-Free) |
| Inlet Filtration Precision | ≥5μm (Stainless Steel Filter) |
| Surge Tank Volume | 20L (Customizable) |
| Pump Temperature Control | ≤60℃ (Pump Body, 25℃ Ambient) |
| Noise Level | ≤85 dB(A) (1m Distance) |
| Power Supply | 380V±10%/50Hz, 8~30kW (Depending on Configuration) |
| Connection Size | DN60~DN120 (Flange, Customizable) |
| Equipment Weight | 300~800kg (Depending on Configuration) |
| Dimensions (L×W×H) | 1600×1000×1500mm (Basic Model) |
| Cleanliness Grade | Class 5 Cleanroom Compatible (Oil-Free) |
| Waste Gas Recovery Rate | ≥95% (Volatile Solvents) |
| Communication Protocol | Modbus/RS485 (MES Integration Support) |
Product uses:
Pharmaceutical manufacturing: vacuum freeze drying (API, vaccine), vacuum distillation (solvent recovery, no oil pollution);
Fine chemicals: vacuum degassing of polymerization reaction, high-purity solvent distillation (waste gas recovery closed loop);
Electronic semiconductors: vacuum treatment before chip coating (Class 5 cleaning, avoid oil pollution);
Environmental protection engineering: vacuum recovery of organic waste gas (such as VOCs treatment, recovery rate ≥95%).
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