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gh Vacuum Exhaust System Multi-Station Vacuum Pumping

Multi-Station High Vacuum Exhaust Table Ultimate vacuum 6.7×10⁻⁴Pa IEC IEC 60255-1 certified

VEAT-001 high vacuum pumping station is a fully automatic vacuum processing equipment designed for semiconductor manufacturing, aerospace component packaging, optoelectronic material processing and other fields. It supports 6-20 stations of synchronous vacuuming, and the ultimate vacuum degree reaches 6.7×10⁻⁴Pa. It adopts an oil-free molecular pump + mechanical pump three-stage system, which complies with IEC 60255 and ISO 9001 standards.

Item No. :
VEAT-001
Minimum Order Quantity (MOQ) :
1 se't
Payment Method :
L/C, T/T
Price :
Negotiatable
Product Origin :
China
Supply Ability :
10 Set per month
Lead Time :
90 Days
Conventional packaging :
Plywood

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Product Details

Multi-Station High Vacuum Exhaust Table Ultimate vacuum 6.7×10⁻⁴Pa IEC IEC 60255-1 certified

Product Introduction

VEAT-001 is based on modular design, integrating STFJ-300 molecular pump unit (pumping speed 300L/s) and air cooling technology, which can quickly start and stabilize to working pressure (≤5.0×10⁻⁴Pa) within 5 minutes. The equipment supports multi-station parallel processing (6-20 stations can be customized), suitable for tubular, plate-shaped and special-shaped workpieces, and has a built-in anti-oil vapor contamination mechanism to ensure the cleanliness of sensitive materials such as photosensitive glass and laser gyroscope cavity 68. Through the PLC intelligent control system, the automated process of vacuuming, baking, and nitrogen filling protection is realized, which is compatible with SCADA system remote monitoring and greatly improves the efficiency of the production line.

Product features

Oil-free high vacuum performance: molecular pump + oil-free mechanical pump combination, ultimate vacuum degree 6.7×10⁻⁴Pa, avoid oil vapor pollution, suitable for semiconductors and precision optical components
Multi-station efficient processing: support 6-20 stations synchronous operation, pumping speed 300L/s, shorten the production cycle by 30%.
Intelligent temperature control system: baking temperature can reach 200℃, precise temperature control (±1℃), equipped with temperature curve display and alarm function.
Industrial-grade reliability: IP65 protection level, wide temperature working range (-10℃~55℃), noise ≤55dB, suitable for harsh environments.
Flexible adaptability: KF40 interface standardized design, support fast replacement of fixtures, adapt to workpieces of different sizes.
Safety guarantee: automatic protection of water/power failure, overpressure alarm and nitrogen recoil function to prevent workpiece oxidation.

International reference standards

ISO 9001:2015 quality management system certification ensures standardized processes for equipment production and service8.
IEC 60255-1 Electrical performance and safety specifications for vacuum equipment, covering insulation strength and electromagnetic compatibility9.
SEMI F47-0706 Cleanliness and stability standards for vacuum systems of semiconductor equipment, limiting particle contamination to ≤0.1μm.

Product use

Semiconductor manufacturing: Wafer packaging, sputtering coating chamber vacuumization to ensure a dust-free environment.
Aerospace components: High vacuum treatment of laser gyroscope resonator and vacuum insulation oil pipe interlayer.
Optoelectronic materials: Baking exhaust and nitrogen protection of photosensitive micro-precision glass and detector electronic glass
New energy field: Preparation of vacuum layer of solar collector tube to improve insulation performance and life.

Technical Parameters

Parameter Category	Details
Ultimate Vacuum	6.7×10⁻⁴ Pa (no-load)
Operating Pressure	≤5.0×10⁻⁴ Pa (within 20 minutes after startup)
Molecular Pump Speed	300 L/s (Model STFJ-300)
Backing Pump Speed	3 L/s (mechanical pump)
Number of Workstations	6-20 workstations (customizable)
Baking Temperature	Room temperature to 200°C (adjustable, accuracy ±1°C)
Power Supply	220AV/24DV 50Hz, total power ≤1KW
Cooling Method	Air-cooled, noise ≤55dB
Interface Standard	KF40 flange, compatible with DN40 pipelines
Protection Level	IP65 (dust and water resistant)
Nitrogen Protection	Workstations equipped with nitrogen charging ports, pressure adjustable from 0.1-0.5 MPa
Data Communication	RS485/Ethernet interfaces, supporting SCADA system integration
Physical Dimensions	Customizable dimensions, standard weight ≤200kg (including accessories)

Test objects and test items

Test objects: vacuum insulated oil pipes, laser gyro cavities, semiconductor coating equipment, solar collector tubes, optoelectronic glass components.

Test items: